1/13/2012	9:37:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/13/2012	9:37:04 AM	Recipe started at 9:37 AM
1/13/2012	9:37:04 AM	Helium valve closed
1/13/2012	9:37:04 AM	H2 valve closed
1/13/2012	9:37:04 AM	BCl3 valve closed
1/13/2012	9:37:04 AM	PH3 valve closed
1/13/2012	9:37:04 AM	SiCl4 pre valve closed
1/13/2012	9:37:04 AM	SiCl4 post valve closed
1/13/2012	9:37:04 AM	Main Vac valve closed
1/13/2012	9:37:04 AM	Bypass valve closed
1/13/2012	9:37:04 AM	Bubbler valve closed
1/13/2012	9:37:04 AM	Helium MFC set to  0.000000
1/13/2012	9:37:04 AM	H2 MFC set to  0.000000
1/13/2012	9:37:04 AM	BCl3 MFC set to  0.000000
1/13/2012	9:37:04 AM	PH3 MFC set to  0.000000
1/13/2012	9:37:04 AM	SiCl4 MFC set to  0.000000
1/13/2012	9:37:04 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	9:37:05 AM	Tube furnace set to 0
1/13/2012	9:37:08 AM	H2 valve closed
1/13/2012	9:37:08 AM	BCl3 valve closed
1/13/2012	9:37:08 AM	PH3 valve closed
1/13/2012	9:37:08 AM	SiCl4 pre valve closed
1/13/2012	9:37:08 AM	SiCl4 post valve closed
1/13/2012	9:37:08 AM	Main Vac valve closed
1/13/2012	9:37:08 AM	Bypass valve closed
1/13/2012	9:37:08 AM	Bubbler valve closed
1/13/2012	9:37:08 AM	Helium valve opened
1/13/2012	9:37:08 AM	Helium MFC set to  500.000000
1/13/2012	9:37:08 AM	H2 MFC set to  0.000000
1/13/2012	9:37:08 AM	BCl3 MFC set to  0.000000
1/13/2012	9:37:08 AM	PH3 MFC set to  0.000000
1/13/2012	9:37:08 AM	SiCl4 MFC set to  0.000000
1/13/2012	9:37:08 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	9:37:08 AM	Tube furnace set to 0
1/13/2012	9:38:13 AM	Helium valve closed
1/13/2012	9:38:13 AM	H2 valve closed
1/13/2012	9:38:13 AM	BCl3 valve closed
1/13/2012	9:38:13 AM	PH3 valve closed
1/13/2012	9:38:13 AM	SiCl4 pre valve closed
1/13/2012	9:38:13 AM	SiCl4 post valve closed
1/13/2012	9:38:13 AM	Main Vac valve closed
1/13/2012	9:38:13 AM	Bypass valve closed
1/13/2012	9:38:13 AM	Bubbler valve closed
1/13/2012	9:38:13 AM	Helium MFC set to  0.000000
1/13/2012	9:38:13 AM	H2 MFC set to  0.000000
1/13/2012	9:38:13 AM	BCl3 MFC set to  0.000000
1/13/2012	9:38:13 AM	PH3 MFC set to  0.000000
1/13/2012	9:38:13 AM	SiCl4 MFC set to  0.000000
1/13/2012	9:38:13 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	9:38:13 AM	Tube furnace set to 0
1/13/2012	9:38:14 AM	Run finished at 9:38 AM
1/13/2012	9:38:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/13/2012	9:49:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2012	9:49:33 AM	Recipe started at 9:49 AM
1/13/2012	9:49:33 AM	Helium valve closed
1/13/2012	9:49:33 AM	H2 valve closed
1/13/2012	9:49:33 AM	BCl3 valve closed
1/13/2012	9:49:33 AM	PH3 valve closed
1/13/2012	9:49:33 AM	SiCl4 pre valve closed
1/13/2012	9:49:33 AM	SiCl4 post valve closed
1/13/2012	9:49:33 AM	Main Vac valve closed
1/13/2012	9:49:33 AM	Bubbler valve closed
1/13/2012	9:49:33 AM	Bypass valve opened
1/13/2012	9:49:33 AM	Helium MFC set to  0.000000
1/13/2012	9:49:33 AM	H2 MFC set to  0.000000
1/13/2012	9:49:33 AM	BCl3 MFC set to  0.000000
1/13/2012	9:49:33 AM	PH3 MFC set to  0.000000
1/13/2012	9:49:33 AM	SiCl4 MFC set to  0.000000
1/13/2012	9:49:33 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	9:49:33 AM	Tube furnace set to 0
1/13/2012	9:50:35 AM	Helium valve closed
1/13/2012	9:50:35 AM	H2 valve closed
1/13/2012	9:50:35 AM	BCl3 valve closed
1/13/2012	9:50:35 AM	PH3 valve closed
1/13/2012	9:50:35 AM	SiCl4 pre valve closed
1/13/2012	9:50:35 AM	SiCl4 post valve closed
1/13/2012	9:50:35 AM	Main Vac valve closed
1/13/2012	9:50:35 AM	Bubbler valve closed
1/13/2012	9:50:35 AM	Bypass valve opened
1/13/2012	9:50:35 AM	Helium MFC set to  0.000000
1/13/2012	9:50:35 AM	H2 MFC set to  0.000000
1/13/2012	9:50:35 AM	BCl3 MFC set to  0.000000
1/13/2012	9:50:35 AM	PH3 MFC set to  0.000000
1/13/2012	9:50:35 AM	SiCl4 MFC set to  0.000000
1/13/2012	9:50:35 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	9:50:35 AM	Tube furnace set to 0
1/13/2012	9:51:35 AM	Helium valve closed
1/13/2012	9:51:35 AM	H2 valve closed
1/13/2012	9:51:35 AM	BCl3 valve closed
1/13/2012	9:51:35 AM	PH3 valve closed
1/13/2012	9:51:35 AM	SiCl4 pre valve closed
1/13/2012	9:51:35 AM	SiCl4 post valve closed
1/13/2012	9:51:35 AM	Bypass valve closed
1/13/2012	9:51:35 AM	Bubbler valve closed
1/13/2012	9:51:35 AM	Main Vac valve opened
1/13/2012	9:51:35 AM	Helium MFC set to  0.000000
1/13/2012	9:51:35 AM	H2 MFC set to  0.000000
1/13/2012	9:51:35 AM	BCl3 MFC set to  0.000000
1/13/2012	9:51:35 AM	PH3 MFC set to  0.000000
1/13/2012	9:51:35 AM	SiCl4 MFC set to  0.000000
1/13/2012	9:51:35 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	9:51:35 AM	Tube furnace set to 0
1/13/2012	9:51:36 AM	Run finished at 9:51 AM
1/13/2012	9:51:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2012	9:55:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/13/2012	9:55:29 AM	Recipe started at 9:55 AM
1/13/2012	9:55:29 AM	Helium valve closed
1/13/2012	9:55:29 AM	H2 valve closed
1/13/2012	9:55:29 AM	BCl3 valve closed
1/13/2012	9:55:29 AM	PH3 valve closed
1/13/2012	9:55:29 AM	SiCl4 pre valve closed
1/13/2012	9:55:29 AM	SiCl4 post valve closed
1/13/2012	9:55:29 AM	Main Vac valve closed
1/13/2012	9:55:29 AM	Bypass valve closed
1/13/2012	9:55:29 AM	Bubbler valve closed
1/13/2012	9:55:29 AM	Helium MFC set to  0.000000
1/13/2012	9:55:29 AM	H2 MFC set to  0.000000
1/13/2012	9:55:29 AM	BCl3 MFC set to  0.000000
1/13/2012	9:55:29 AM	PH3 MFC set to  0.000000
1/13/2012	9:55:29 AM	SiCl4 MFC set to  0.000000
1/13/2012	9:55:29 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	9:55:29 AM	Tube furnace set to 0
1/13/2012	9:55:32 AM	H2 valve closed
1/13/2012	9:55:32 AM	BCl3 valve closed
1/13/2012	9:55:32 AM	PH3 valve closed
1/13/2012	9:55:32 AM	SiCl4 pre valve closed
1/13/2012	9:55:32 AM	SiCl4 post valve closed
1/13/2012	9:55:32 AM	Main Vac valve closed
1/13/2012	9:55:32 AM	Bypass valve closed
1/13/2012	9:55:32 AM	Bubbler valve closed
1/13/2012	9:55:32 AM	Helium valve opened
1/13/2012	9:55:32 AM	Helium MFC set to  500.000000
1/13/2012	9:55:32 AM	H2 MFC set to  0.000000
1/13/2012	9:55:32 AM	BCl3 MFC set to  0.000000
1/13/2012	9:55:32 AM	PH3 MFC set to  0.000000
1/13/2012	9:55:32 AM	SiCl4 MFC set to  0.000000
1/13/2012	9:55:32 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	9:55:32 AM	Tube furnace set to 0
1/13/2012	9:56:40 AM	Helium valve closed
1/13/2012	9:56:40 AM	H2 valve closed
1/13/2012	9:56:40 AM	BCl3 valve closed
1/13/2012	9:56:40 AM	PH3 valve closed
1/13/2012	9:56:40 AM	SiCl4 pre valve closed
1/13/2012	9:56:40 AM	SiCl4 post valve closed
1/13/2012	9:56:40 AM	Main Vac valve closed
1/13/2012	9:56:40 AM	Bypass valve closed
1/13/2012	9:56:40 AM	Bubbler valve closed
1/13/2012	9:56:40 AM	Helium MFC set to  0.000000
1/13/2012	9:56:40 AM	H2 MFC set to  0.000000
1/13/2012	9:56:40 AM	BCl3 MFC set to  0.000000
1/13/2012	9:56:40 AM	PH3 MFC set to  0.000000
1/13/2012	9:56:40 AM	SiCl4 MFC set to  0.000000
1/13/2012	9:56:40 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	9:56:40 AM	Tube furnace set to 0
1/13/2012	9:56:41 AM	Run finished at 9:56 AM
1/13/2012	9:56:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/13/2012	10:08:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2012	10:08:05 AM	Recipe started at 10:08 AM
1/13/2012	10:08:05 AM	Helium valve closed
1/13/2012	10:08:05 AM	H2 valve closed
1/13/2012	10:08:05 AM	BCl3 valve closed
1/13/2012	10:08:05 AM	PH3 valve closed
1/13/2012	10:08:05 AM	SiCl4 pre valve closed
1/13/2012	10:08:05 AM	SiCl4 post valve closed
1/13/2012	10:08:05 AM	Main Vac valve closed
1/13/2012	10:08:05 AM	Bubbler valve closed
1/13/2012	10:08:05 AM	Bypass valve opened
1/13/2012	10:08:05 AM	Helium MFC set to  0.000000
1/13/2012	10:08:05 AM	H2 MFC set to  0.000000
1/13/2012	10:08:05 AM	BCl3 MFC set to  0.000000
1/13/2012	10:08:05 AM	PH3 MFC set to  0.000000
1/13/2012	10:08:05 AM	SiCl4 MFC set to  0.000000
1/13/2012	10:08:05 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	10:08:05 AM	Tube furnace set to 0
1/13/2012	10:09:08 AM	Helium valve closed
1/13/2012	10:09:08 AM	H2 valve closed
1/13/2012	10:09:08 AM	BCl3 valve closed
1/13/2012	10:09:08 AM	PH3 valve closed
1/13/2012	10:09:08 AM	SiCl4 pre valve closed
1/13/2012	10:09:08 AM	SiCl4 post valve closed
1/13/2012	10:09:08 AM	Main Vac valve closed
1/13/2012	10:09:08 AM	Bubbler valve closed
1/13/2012	10:09:08 AM	Bypass valve opened
1/13/2012	10:09:08 AM	Helium MFC set to  0.000000
1/13/2012	10:09:08 AM	H2 MFC set to  0.000000
1/13/2012	10:09:08 AM	BCl3 MFC set to  0.000000
1/13/2012	10:09:08 AM	PH3 MFC set to  0.000000
1/13/2012	10:09:08 AM	SiCl4 MFC set to  0.000000
1/13/2012	10:09:08 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	10:09:08 AM	Tube furnace set to 0
1/13/2012	10:10:08 AM	Helium valve closed
1/13/2012	10:10:08 AM	H2 valve closed
1/13/2012	10:10:08 AM	BCl3 valve closed
1/13/2012	10:10:08 AM	PH3 valve closed
1/13/2012	10:10:08 AM	SiCl4 pre valve closed
1/13/2012	10:10:08 AM	SiCl4 post valve closed
1/13/2012	10:10:08 AM	Bypass valve closed
1/13/2012	10:10:08 AM	Bubbler valve closed
1/13/2012	10:10:08 AM	Main Vac valve opened
1/13/2012	10:10:08 AM	Helium MFC set to  0.000000
1/13/2012	10:10:08 AM	H2 MFC set to  0.000000
1/13/2012	10:10:08 AM	BCl3 MFC set to  0.000000
1/13/2012	10:10:08 AM	PH3 MFC set to  0.000000
1/13/2012	10:10:08 AM	SiCl4 MFC set to  0.000000
1/13/2012	10:10:08 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	10:10:08 AM	Tube furnace set to 0
1/13/2012	10:10:09 AM	Run finished at 10:10 AM
1/13/2012	10:10:09 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2012	10:33:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/13/2012	10:33:02 AM	Recipe started at 10:33 AM
1/13/2012	10:33:02 AM	Helium valve closed
1/13/2012	10:33:02 AM	H2 valve closed
1/13/2012	10:33:02 AM	BCl3 valve closed
1/13/2012	10:33:02 AM	PH3 valve closed
1/13/2012	10:33:02 AM	SiCl4 pre valve closed
1/13/2012	10:33:02 AM	SiCl4 post valve closed
1/13/2012	10:33:02 AM	Main Vac valve closed
1/13/2012	10:33:02 AM	Bypass valve closed
1/13/2012	10:33:02 AM	Bubbler valve closed
1/13/2012	10:33:02 AM	Helium MFC set to  0.000000
1/13/2012	10:33:02 AM	H2 MFC set to  0.000000
1/13/2012	10:33:02 AM	BCl3 MFC set to  0.000000
1/13/2012	10:33:02 AM	PH3 MFC set to  0.000000
1/13/2012	10:33:02 AM	SiCl4 MFC set to  0.000000
1/13/2012	10:33:02 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	10:33:02 AM	Tube furnace set to 0
1/13/2012	10:33:02 AM	Run finished at 10:33 AM
1/13/2012	10:33:02 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/13/2012	10:33:39 AM	Main Vac valve opened
1/13/2012	10:34:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/13/2012	10:35:11 AM	Recipe started at 10:35 AM
1/13/2012	10:35:11 AM	Helium valve closed
1/13/2012	10:35:11 AM	H2 valve closed
1/13/2012	10:35:11 AM	BCl3 valve closed
1/13/2012	10:35:11 AM	PH3 valve closed
1/13/2012	10:35:11 AM	SiCl4 pre valve closed
1/13/2012	10:35:11 AM	SiCl4 post valve closed
1/13/2012	10:35:11 AM	Main Vac valve closed
1/13/2012	10:35:11 AM	Bubbler valve closed
1/13/2012	10:35:11 AM	Bypass valve opened
1/13/2012	10:35:11 AM	Helium MFC set to  0.000000
1/13/2012	10:35:11 AM	H2 MFC set to  0.000000
1/13/2012	10:35:11 AM	BCl3 MFC set to  0.000000
1/13/2012	10:35:11 AM	PH3 MFC set to  0.000000
1/13/2012	10:35:11 AM	SiCl4 MFC set to  0.000000
1/13/2012	10:35:11 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	10:35:11 AM	Tube furnace set to 0
1/13/2012	10:35:11 AM	Helium valve closed
1/13/2012	10:35:11 AM	H2 valve closed
1/13/2012	10:35:11 AM	BCl3 valve closed
1/13/2012	10:35:11 AM	PH3 valve closed
1/13/2012	10:35:11 AM	SiCl4 pre valve closed
1/13/2012	10:35:11 AM	SiCl4 post valve closed
1/13/2012	10:35:11 AM	Main Vac valve closed
1/13/2012	10:35:11 AM	Bubbler valve closed
1/13/2012	10:35:11 AM	Bypass valve opened
1/13/2012	10:35:11 AM	Helium MFC set to  0.000000
1/13/2012	10:35:11 AM	H2 MFC set to  0.000000
1/13/2012	10:35:11 AM	BCl3 MFC set to  0.000000
1/13/2012	10:35:11 AM	PH3 MFC set to  0.000000
1/13/2012	10:35:11 AM	SiCl4 MFC set to  0.000000
1/13/2012	10:35:11 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	10:35:11 AM	Tube furnace set to 0
1/13/2012	10:35:34 AM	Helium valve closed
1/13/2012	10:35:34 AM	H2 valve closed
1/13/2012	10:35:34 AM	BCl3 valve closed
1/13/2012	10:35:34 AM	PH3 valve closed
1/13/2012	10:35:34 AM	SiCl4 pre valve closed
1/13/2012	10:35:34 AM	SiCl4 post valve closed
1/13/2012	10:35:34 AM	Bypass valve closed
1/13/2012	10:35:34 AM	Bubbler valve closed
1/13/2012	10:35:34 AM	Main Vac valve opened
1/13/2012	10:35:34 AM	Helium MFC set to  0.000000
1/13/2012	10:35:34 AM	H2 MFC set to  0.000000
1/13/2012	10:35:34 AM	BCl3 MFC set to  0.000000
1/13/2012	10:35:34 AM	PH3 MFC set to  0.000000
1/13/2012	10:35:34 AM	SiCl4 MFC set to  0.000000
1/13/2012	10:35:34 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	10:35:34 AM	Tube furnace set to 0
1/13/2012	10:35:54 AM	H2 valve closed
1/13/2012	10:35:54 AM	BCl3 valve closed
1/13/2012	10:35:54 AM	PH3 valve closed
1/13/2012	10:35:54 AM	SiCl4 pre valve closed
1/13/2012	10:35:54 AM	SiCl4 post valve closed
1/13/2012	10:35:54 AM	Bypass valve closed
1/13/2012	10:35:54 AM	Bubbler valve closed
1/13/2012	10:35:54 AM	Helium valve opened
1/13/2012	10:35:54 AM	Main Vac valve opened
1/13/2012	10:35:54 AM	Helium MFC set to  20.000000
1/13/2012	10:35:54 AM	H2 MFC set to  0.000000
1/13/2012	10:35:54 AM	BCl3 MFC set to  0.000000
1/13/2012	10:35:54 AM	PH3 MFC set to  0.000000
1/13/2012	10:35:54 AM	SiCl4 MFC set to  0.000000
1/13/2012	10:35:54 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	10:35:54 AM	Tube furnace set to 0
1/13/2012	10:36:24 AM	Helium valve closed
1/13/2012	10:36:24 AM	H2 valve closed
1/13/2012	10:36:24 AM	BCl3 valve closed
1/13/2012	10:36:24 AM	PH3 valve closed
1/13/2012	10:36:24 AM	SiCl4 pre valve closed
1/13/2012	10:36:24 AM	SiCl4 post valve closed
1/13/2012	10:36:24 AM	Bypass valve closed
1/13/2012	10:36:24 AM	Bubbler valve closed
1/13/2012	10:36:24 AM	Main Vac valve opened
1/13/2012	10:36:24 AM	Helium MFC set to  0.000000
1/13/2012	10:36:24 AM	H2 MFC set to  0.000000
1/13/2012	10:36:24 AM	BCl3 MFC set to  0.000000
1/13/2012	10:36:24 AM	PH3 MFC set to  0.000000
1/13/2012	10:36:24 AM	SiCl4 MFC set to  0.000000
1/13/2012	10:36:24 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	10:36:24 AM	Tube furnace set to 0
1/13/2012	10:36:54 AM	H2 valve closed
1/13/2012	10:36:54 AM	BCl3 valve closed
1/13/2012	10:36:54 AM	PH3 valve closed
1/13/2012	10:36:54 AM	SiCl4 pre valve closed
1/13/2012	10:36:54 AM	SiCl4 post valve closed
1/13/2012	10:36:54 AM	Bypass valve closed
1/13/2012	10:36:54 AM	Bubbler valve closed
1/13/2012	10:36:54 AM	Helium valve opened
1/13/2012	10:36:54 AM	Main Vac valve opened
1/13/2012	10:36:54 AM	Helium MFC set to  20.000000
1/13/2012	10:36:54 AM	H2 MFC set to  0.000000
1/13/2012	10:36:54 AM	BCl3 MFC set to  0.000000
1/13/2012	10:36:54 AM	PH3 MFC set to  0.000000
1/13/2012	10:36:54 AM	SiCl4 MFC set to  0.000000
1/13/2012	10:36:54 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	10:36:55 AM	Tube furnace set to 0
1/13/2012	10:37:25 AM	Helium valve closed
1/13/2012	10:37:25 AM	H2 valve closed
1/13/2012	10:37:25 AM	BCl3 valve closed
1/13/2012	10:37:25 AM	PH3 valve closed
1/13/2012	10:37:25 AM	SiCl4 pre valve closed
1/13/2012	10:37:25 AM	SiCl4 post valve closed
1/13/2012	10:37:25 AM	Bypass valve closed
1/13/2012	10:37:25 AM	Bubbler valve closed
1/13/2012	10:37:25 AM	Main Vac valve opened
1/13/2012	10:37:25 AM	Helium MFC set to  0.000000
1/13/2012	10:37:25 AM	H2 MFC set to  0.000000
1/13/2012	10:37:25 AM	BCl3 MFC set to  0.000000
1/13/2012	10:37:25 AM	PH3 MFC set to  0.000000
1/13/2012	10:37:25 AM	SiCl4 MFC set to  0.000000
1/13/2012	10:37:25 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	10:37:25 AM	Tube furnace set to 0
1/13/2012	10:37:55 AM	H2 valve closed
1/13/2012	10:37:55 AM	BCl3 valve closed
1/13/2012	10:37:55 AM	PH3 valve closed
1/13/2012	10:37:55 AM	SiCl4 pre valve closed
1/13/2012	10:37:55 AM	SiCl4 post valve closed
1/13/2012	10:37:55 AM	Bypass valve closed
1/13/2012	10:37:55 AM	Bubbler valve closed
1/13/2012	10:37:55 AM	Helium valve opened
1/13/2012	10:37:55 AM	Main Vac valve opened
1/13/2012	10:37:55 AM	Helium MFC set to  20.000000
1/13/2012	10:37:55 AM	H2 MFC set to  0.000000
1/13/2012	10:37:55 AM	BCl3 MFC set to  0.000000
1/13/2012	10:37:55 AM	PH3 MFC set to  0.000000
1/13/2012	10:37:55 AM	SiCl4 MFC set to  0.000000
1/13/2012	10:37:55 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	10:37:55 AM	Tube furnace set to 0
1/13/2012	10:38:25 AM	Helium valve closed
1/13/2012	10:38:25 AM	H2 valve closed
1/13/2012	10:38:25 AM	BCl3 valve closed
1/13/2012	10:38:25 AM	PH3 valve closed
1/13/2012	10:38:25 AM	SiCl4 pre valve closed
1/13/2012	10:38:25 AM	SiCl4 post valve closed
1/13/2012	10:38:25 AM	Bypass valve closed
1/13/2012	10:38:25 AM	Bubbler valve closed
1/13/2012	10:38:25 AM	Main Vac valve opened
1/13/2012	10:38:25 AM	Helium MFC set to  0.000000
1/13/2012	10:38:25 AM	H2 MFC set to  0.000000
1/13/2012	10:38:25 AM	BCl3 MFC set to  0.000000
1/13/2012	10:38:25 AM	PH3 MFC set to  0.000000
1/13/2012	10:38:25 AM	SiCl4 MFC set to  0.000000
1/13/2012	10:38:25 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	10:38:25 AM	Tube furnace set to 0
1/13/2012	10:38:55 AM	H2 valve closed
1/13/2012	10:38:55 AM	BCl3 valve closed
1/13/2012	10:38:55 AM	PH3 valve closed
1/13/2012	10:38:55 AM	SiCl4 pre valve closed
1/13/2012	10:38:55 AM	SiCl4 post valve closed
1/13/2012	10:38:55 AM	Bypass valve closed
1/13/2012	10:38:55 AM	Bubbler valve closed
1/13/2012	10:38:55 AM	Helium valve opened
1/13/2012	10:38:55 AM	Main Vac valve opened
1/13/2012	10:38:55 AM	Helium MFC set to  20.000000
1/13/2012	10:38:55 AM	H2 MFC set to  0.000000
1/13/2012	10:38:55 AM	BCl3 MFC set to  0.000000
1/13/2012	10:38:55 AM	PH3 MFC set to  0.000000
1/13/2012	10:38:55 AM	SiCl4 MFC set to  0.000000
1/13/2012	10:38:55 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	10:38:55 AM	Tube furnace set to 0
1/13/2012	10:39:25 AM	Helium valve closed
1/13/2012	10:39:25 AM	H2 valve closed
1/13/2012	10:39:25 AM	BCl3 valve closed
1/13/2012	10:39:25 AM	PH3 valve closed
1/13/2012	10:39:25 AM	SiCl4 pre valve closed
1/13/2012	10:39:25 AM	SiCl4 post valve closed
1/13/2012	10:39:25 AM	Bypass valve closed
1/13/2012	10:39:25 AM	Bubbler valve closed
1/13/2012	10:39:25 AM	Main Vac valve opened
1/13/2012	10:39:25 AM	Helium MFC set to  0.000000
1/13/2012	10:39:25 AM	H2 MFC set to  0.000000
1/13/2012	10:39:25 AM	BCl3 MFC set to  0.000000
1/13/2012	10:39:25 AM	PH3 MFC set to  0.000000
1/13/2012	10:39:25 AM	SiCl4 MFC set to  0.000000
1/13/2012	10:39:25 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	10:39:26 AM	Tube furnace set to 0
1/13/2012	10:39:56 AM	H2 valve closed
1/13/2012	10:39:56 AM	BCl3 valve closed
1/13/2012	10:39:56 AM	PH3 valve closed
1/13/2012	10:39:56 AM	SiCl4 pre valve closed
1/13/2012	10:39:56 AM	SiCl4 post valve closed
1/13/2012	10:39:56 AM	Bypass valve closed
1/13/2012	10:39:56 AM	Bubbler valve closed
1/13/2012	10:39:56 AM	Helium valve opened
1/13/2012	10:39:56 AM	Main Vac valve opened
1/13/2012	10:39:56 AM	Helium MFC set to  20.000000
1/13/2012	10:39:56 AM	H2 MFC set to  0.000000
1/13/2012	10:39:56 AM	BCl3 MFC set to  0.000000
1/13/2012	10:39:56 AM	PH3 MFC set to  0.000000
1/13/2012	10:39:56 AM	SiCl4 MFC set to  0.000000
1/13/2012	10:39:56 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	10:39:56 AM	Tube furnace set to 0
1/13/2012	10:40:26 AM	Helium valve closed
1/13/2012	10:40:26 AM	H2 valve closed
1/13/2012	10:40:26 AM	BCl3 valve closed
1/13/2012	10:40:26 AM	PH3 valve closed
1/13/2012	10:40:26 AM	SiCl4 pre valve closed
1/13/2012	10:40:26 AM	SiCl4 post valve closed
1/13/2012	10:40:26 AM	Bypass valve closed
1/13/2012	10:40:26 AM	Bubbler valve closed
1/13/2012	10:40:26 AM	Main Vac valve opened
1/13/2012	10:40:26 AM	Helium MFC set to  0.000000
1/13/2012	10:40:26 AM	H2 MFC set to  0.000000
1/13/2012	10:40:26 AM	BCl3 MFC set to  0.000000
1/13/2012	10:40:26 AM	PH3 MFC set to  0.000000
1/13/2012	10:40:26 AM	SiCl4 MFC set to  0.000000
1/13/2012	10:40:26 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	10:40:26 AM	Tube furnace set to 0
1/13/2012	10:40:56 AM	H2 valve closed
1/13/2012	10:40:56 AM	BCl3 valve closed
1/13/2012	10:40:56 AM	PH3 valve closed
1/13/2012	10:40:56 AM	SiCl4 pre valve closed
1/13/2012	10:40:56 AM	SiCl4 post valve closed
1/13/2012	10:40:56 AM	Bypass valve closed
1/13/2012	10:40:56 AM	Bubbler valve closed
1/13/2012	10:40:56 AM	Helium valve opened
1/13/2012	10:40:56 AM	Main Vac valve opened
1/13/2012	10:40:56 AM	Helium MFC set to  20.000000
1/13/2012	10:40:56 AM	H2 MFC set to  0.000000
1/13/2012	10:40:56 AM	BCl3 MFC set to  0.000000
1/13/2012	10:40:56 AM	PH3 MFC set to  0.000000
1/13/2012	10:40:56 AM	SiCl4 MFC set to  0.000000
1/13/2012	10:40:56 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	10:40:56 AM	Tube furnace set to 0
1/13/2012	10:41:26 AM	Helium valve closed
1/13/2012	10:41:26 AM	H2 valve closed
1/13/2012	10:41:26 AM	BCl3 valve closed
1/13/2012	10:41:26 AM	PH3 valve closed
1/13/2012	10:41:26 AM	SiCl4 pre valve closed
1/13/2012	10:41:26 AM	SiCl4 post valve closed
1/13/2012	10:41:26 AM	Bypass valve closed
1/13/2012	10:41:26 AM	Bubbler valve closed
1/13/2012	10:41:26 AM	Main Vac valve opened
1/13/2012	10:41:26 AM	Helium MFC set to  0.000000
1/13/2012	10:41:26 AM	H2 MFC set to  0.000000
1/13/2012	10:41:26 AM	BCl3 MFC set to  0.000000
1/13/2012	10:41:26 AM	PH3 MFC set to  0.000000
1/13/2012	10:41:26 AM	SiCl4 MFC set to  0.000000
1/13/2012	10:41:26 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	10:41:26 AM	Tube furnace set to 0
1/13/2012	10:41:56 AM	H2 valve closed
1/13/2012	10:41:56 AM	BCl3 valve closed
1/13/2012	10:41:56 AM	PH3 valve closed
1/13/2012	10:41:56 AM	SiCl4 pre valve closed
1/13/2012	10:41:56 AM	SiCl4 post valve closed
1/13/2012	10:41:56 AM	Bypass valve closed
1/13/2012	10:41:56 AM	Bubbler valve closed
1/13/2012	10:41:56 AM	Helium valve opened
1/13/2012	10:41:56 AM	Main Vac valve opened
1/13/2012	10:41:56 AM	Helium MFC set to  20.000000
1/13/2012	10:41:56 AM	H2 MFC set to  0.000000
1/13/2012	10:41:56 AM	BCl3 MFC set to  0.000000
1/13/2012	10:41:56 AM	PH3 MFC set to  0.000000
1/13/2012	10:41:56 AM	SiCl4 MFC set to  0.000000
1/13/2012	10:41:56 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	10:41:57 AM	Tube furnace set to 0
1/13/2012	10:42:27 AM	Helium valve closed
1/13/2012	10:42:27 AM	H2 valve closed
1/13/2012	10:42:27 AM	BCl3 valve closed
1/13/2012	10:42:27 AM	PH3 valve closed
1/13/2012	10:42:27 AM	SiCl4 pre valve closed
1/13/2012	10:42:27 AM	SiCl4 post valve closed
1/13/2012	10:42:27 AM	Bypass valve closed
1/13/2012	10:42:27 AM	Bubbler valve closed
1/13/2012	10:42:27 AM	Main Vac valve opened
1/13/2012	10:42:27 AM	Helium MFC set to  0.000000
1/13/2012	10:42:27 AM	H2 MFC set to  0.000000
1/13/2012	10:42:27 AM	BCl3 MFC set to  0.000000
1/13/2012	10:42:27 AM	PH3 MFC set to  0.000000
1/13/2012	10:42:27 AM	SiCl4 MFC set to  0.000000
1/13/2012	10:42:27 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	10:42:27 AM	Tube furnace set to 0
1/13/2012	10:42:57 AM	H2 valve closed
1/13/2012	10:42:57 AM	BCl3 valve closed
1/13/2012	10:42:57 AM	PH3 valve closed
1/13/2012	10:42:57 AM	SiCl4 pre valve closed
1/13/2012	10:42:57 AM	SiCl4 post valve closed
1/13/2012	10:42:57 AM	Bypass valve closed
1/13/2012	10:42:57 AM	Bubbler valve closed
1/13/2012	10:42:57 AM	Helium valve opened
1/13/2012	10:42:57 AM	Main Vac valve opened
1/13/2012	10:42:57 AM	Helium MFC set to  20.000000
1/13/2012	10:42:57 AM	H2 MFC set to  0.000000
1/13/2012	10:42:57 AM	BCl3 MFC set to  0.000000
1/13/2012	10:42:57 AM	PH3 MFC set to  0.000000
1/13/2012	10:42:57 AM	SiCl4 MFC set to  0.000000
1/13/2012	10:42:57 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	10:42:57 AM	Tube furnace set to 0
1/13/2012	10:43:27 AM	Helium valve closed
1/13/2012	10:43:27 AM	H2 valve closed
1/13/2012	10:43:27 AM	BCl3 valve closed
1/13/2012	10:43:27 AM	PH3 valve closed
1/13/2012	10:43:27 AM	SiCl4 pre valve closed
1/13/2012	10:43:27 AM	SiCl4 post valve closed
1/13/2012	10:43:27 AM	Bypass valve closed
1/13/2012	10:43:27 AM	Bubbler valve closed
1/13/2012	10:43:27 AM	Main Vac valve opened
1/13/2012	10:43:27 AM	Helium MFC set to  0.000000
1/13/2012	10:43:27 AM	H2 MFC set to  0.000000
1/13/2012	10:43:27 AM	BCl3 MFC set to  0.000000
1/13/2012	10:43:27 AM	PH3 MFC set to  0.000000
1/13/2012	10:43:27 AM	SiCl4 MFC set to  0.000000
1/13/2012	10:43:27 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	10:43:27 AM	Tube furnace set to 0
1/13/2012	10:43:57 AM	H2 valve closed
1/13/2012	10:43:57 AM	BCl3 valve closed
1/13/2012	10:43:57 AM	PH3 valve closed
1/13/2012	10:43:57 AM	SiCl4 pre valve closed
1/13/2012	10:43:57 AM	SiCl4 post valve closed
1/13/2012	10:43:57 AM	Bypass valve closed
1/13/2012	10:43:57 AM	Bubbler valve closed
1/13/2012	10:43:57 AM	Helium valve opened
1/13/2012	10:43:57 AM	Main Vac valve opened
1/13/2012	10:43:57 AM	Helium MFC set to  20.000000
1/13/2012	10:43:57 AM	H2 MFC set to  0.000000
1/13/2012	10:43:57 AM	BCl3 MFC set to  0.000000
1/13/2012	10:43:57 AM	PH3 MFC set to  0.000000
1/13/2012	10:43:57 AM	SiCl4 MFC set to  0.000000
1/13/2012	10:43:57 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	10:43:57 AM	Tube furnace set to 0
1/13/2012	10:44:27 AM	Helium valve closed
1/13/2012	10:44:27 AM	H2 valve closed
1/13/2012	10:44:27 AM	BCl3 valve closed
1/13/2012	10:44:27 AM	PH3 valve closed
1/13/2012	10:44:27 AM	SiCl4 pre valve closed
1/13/2012	10:44:27 AM	SiCl4 post valve closed
1/13/2012	10:44:27 AM	Bypass valve closed
1/13/2012	10:44:27 AM	Bubbler valve closed
1/13/2012	10:44:27 AM	Main Vac valve opened
1/13/2012	10:44:28 AM	Helium MFC set to  0.000000
1/13/2012	10:44:28 AM	H2 MFC set to  0.000000
1/13/2012	10:44:28 AM	BCl3 MFC set to  0.000000
1/13/2012	10:44:28 AM	PH3 MFC set to  0.000000
1/13/2012	10:44:28 AM	SiCl4 MFC set to  0.000000
1/13/2012	10:44:28 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	10:44:28 AM	Tube furnace set to 0
1/13/2012	10:44:58 AM	H2 valve closed
1/13/2012	10:44:58 AM	BCl3 valve closed
1/13/2012	10:44:58 AM	PH3 valve closed
1/13/2012	10:44:58 AM	SiCl4 pre valve closed
1/13/2012	10:44:58 AM	SiCl4 post valve closed
1/13/2012	10:44:58 AM	Bypass valve closed
1/13/2012	10:44:58 AM	Bubbler valve closed
1/13/2012	10:44:58 AM	Helium valve opened
1/13/2012	10:44:58 AM	Main Vac valve opened
1/13/2012	10:44:58 AM	Helium MFC set to  20.000000
1/13/2012	10:44:58 AM	H2 MFC set to  0.000000
1/13/2012	10:44:58 AM	BCl3 MFC set to  0.000000
1/13/2012	10:44:58 AM	PH3 MFC set to  0.000000
1/13/2012	10:44:58 AM	SiCl4 MFC set to  0.000000
1/13/2012	10:44:58 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	10:44:58 AM	Tube furnace set to 0
1/13/2012	10:45:28 AM	Helium valve closed
1/13/2012	10:45:28 AM	H2 valve closed
1/13/2012	10:45:28 AM	BCl3 valve closed
1/13/2012	10:45:28 AM	PH3 valve closed
1/13/2012	10:45:28 AM	SiCl4 pre valve closed
1/13/2012	10:45:28 AM	SiCl4 post valve closed
1/13/2012	10:45:28 AM	Bypass valve closed
1/13/2012	10:45:28 AM	Bubbler valve closed
1/13/2012	10:45:28 AM	Main Vac valve opened
1/13/2012	10:45:28 AM	Helium MFC set to  0.000000
1/13/2012	10:45:28 AM	H2 MFC set to  0.000000
1/13/2012	10:45:28 AM	BCl3 MFC set to  0.000000
1/13/2012	10:45:28 AM	PH3 MFC set to  0.000000
1/13/2012	10:45:28 AM	SiCl4 MFC set to  0.000000
1/13/2012	10:45:28 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	10:45:28 AM	Tube furnace set to 0
1/13/2012	10:45:29 AM	Run finished at 10:45 AM
1/13/2012	10:45:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/13/2012	10:54:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/13/2012	10:54:17 AM	Recipe started at 10:54 AM
1/13/2012	10:54:17 AM	Helium valve closed
1/13/2012	10:54:17 AM	H2 valve closed
1/13/2012	10:54:17 AM	BCl3 valve closed
1/13/2012	10:54:17 AM	PH3 valve closed
1/13/2012	10:54:17 AM	SiCl4 pre valve closed
1/13/2012	10:54:17 AM	SiCl4 post valve closed
1/13/2012	10:54:17 AM	Main Vac valve closed
1/13/2012	10:54:17 AM	Bypass valve closed
1/13/2012	10:54:17 AM	Bubbler valve closed
1/13/2012	10:54:17 AM	Helium MFC set to  0.000000
1/13/2012	10:54:17 AM	H2 MFC set to  0.000000
1/13/2012	10:54:17 AM	BCl3 MFC set to  0.000000
1/13/2012	10:54:17 AM	PH3 MFC set to  0.000000
1/13/2012	10:54:17 AM	SiCl4 MFC set to  0.000000
1/13/2012	10:54:17 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	10:54:18 AM	Tube furnace set to 0
1/13/2012	10:54:18 AM	Run finished at 10:54 AM
1/13/2012	10:54:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/13/2012	10:55:20 AM	Main Vac valve opened
1/13/2012	10:58:18 AM	Main Vac valve closed
1/13/2012	10:58:19 AM	Main Vac valve opened
1/13/2012	11:08:43 AM	Recipe started at 11:08 AM
1/13/2012	11:08:43 AM	Helium valve closed
1/13/2012	11:08:43 AM	H2 valve closed
1/13/2012	11:08:43 AM	BCl3 valve closed
1/13/2012	11:08:43 AM	PH3 valve closed
1/13/2012	11:08:43 AM	SiCl4 pre valve closed
1/13/2012	11:08:43 AM	SiCl4 post valve closed
1/13/2012	11:08:43 AM	Main Vac valve closed
1/13/2012	11:08:43 AM	Bypass valve closed
1/13/2012	11:08:43 AM	Bubbler valve closed
1/13/2012	11:08:43 AM	Helium MFC set to  0.000000
1/13/2012	11:08:43 AM	H2 MFC set to  0.000000
1/13/2012	11:08:43 AM	BCl3 MFC set to  0.000000
1/13/2012	11:08:43 AM	PH3 MFC set to  0.000000
1/13/2012	11:08:43 AM	SiCl4 MFC set to  0.000000
1/13/2012	11:08:43 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	11:08:43 AM	Tube furnace set to 0
1/13/2012	11:08:47 AM	Helium valve closed
1/13/2012	11:08:47 AM	BCl3 valve closed
1/13/2012	11:08:47 AM	PH3 valve closed
1/13/2012	11:08:47 AM	SiCl4 pre valve closed
1/13/2012	11:08:47 AM	SiCl4 post valve closed
1/13/2012	11:08:47 AM	Main Vac valve closed
1/13/2012	11:08:47 AM	Bypass valve closed
1/13/2012	11:08:47 AM	Bubbler valve closed
1/13/2012	11:08:47 AM	H2 valve opened
1/13/2012	11:08:47 AM	Helium MFC set to  0.000000
1/13/2012	11:08:47 AM	H2 MFC set to  500.000000
1/13/2012	11:08:47 AM	BCl3 MFC set to  0.000000
1/13/2012	11:08:47 AM	PH3 MFC set to  0.000000
1/13/2012	11:08:47 AM	SiCl4 MFC set to  0.000000
1/13/2012	11:08:47 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	11:08:47 AM	Tube furnace set to 0
1/13/2012	11:09:57 AM	Helium valve closed
1/13/2012	11:09:57 AM	BCl3 valve closed
1/13/2012	11:09:57 AM	PH3 valve closed
1/13/2012	11:09:57 AM	SiCl4 pre valve closed
1/13/2012	11:09:57 AM	SiCl4 post valve closed
1/13/2012	11:09:57 AM	Main Vac valve closed
1/13/2012	11:09:57 AM	Bypass valve closed
1/13/2012	11:09:57 AM	H2 valve opened
1/13/2012	11:09:57 AM	Bubbler valve opened
1/13/2012	11:09:57 AM	Helium MFC set to  0.000000
1/13/2012	11:09:57 AM	H2 MFC set to  500.000000
1/13/2012	11:09:57 AM	BCl3 MFC set to  0.000000
1/13/2012	11:09:57 AM	PH3 MFC set to  0.000000
1/13/2012	11:09:57 AM	SiCl4 MFC set to  0.000000
1/13/2012	11:09:57 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	11:09:57 AM	Tube furnace set to 0
1/13/2012	11:09:58 AM	Helium valve closed
1/13/2012	11:09:58 AM	BCl3 valve closed
1/13/2012	11:09:58 AM	PH3 valve closed
1/13/2012	11:09:58 AM	SiCl4 pre valve closed
1/13/2012	11:09:58 AM	SiCl4 post valve closed
1/13/2012	11:09:58 AM	Main Vac valve closed
1/13/2012	11:09:58 AM	Bypass valve closed
1/13/2012	11:09:58 AM	H2 valve opened
1/13/2012	11:09:58 AM	Bubbler valve opened
1/13/2012	11:09:58 AM	Helium MFC set to  0.000000
1/13/2012	11:09:58 AM	H2 MFC set to  500.000000
1/13/2012	11:09:58 AM	BCl3 MFC set to  0.000000
1/13/2012	11:09:58 AM	PH3 MFC set to  0.000000
1/13/2012	11:09:58 AM	SiCl4 MFC set to  0.000000
1/13/2012	11:09:58 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	11:09:59 AM	Tube furnace set to 1000
1/13/2012	11:29:59 AM	Helium valve closed
1/13/2012	11:29:59 AM	PH3 valve closed
1/13/2012	11:29:59 AM	Main Vac valve closed
1/13/2012	11:29:59 AM	Bypass valve closed
1/13/2012	11:29:59 AM	H2 valve opened
1/13/2012	11:29:59 AM	BCl3 valve opened
1/13/2012	11:29:59 AM	SiCl4 pre valve opened
1/13/2012	11:29:59 AM	SiCl4 post valve opened
1/13/2012	11:29:59 AM	Bubbler valve opened
1/13/2012	11:29:59 AM	Helium MFC set to  0.000000
1/13/2012	11:29:59 AM	H2 MFC set to  500.000000
1/13/2012	11:29:59 AM	BCl3 MFC set to  1.000000
1/13/2012	11:29:59 AM	PH3 MFC set to  0.000000
1/13/2012	11:29:59 AM	SiCl4 MFC set to  50.000000
1/13/2012	11:29:59 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	11:29:59 AM	Tube furnace set to 1000
1/13/2012	11:49:59 AM	Helium valve closed
1/13/2012	11:49:59 AM	BCl3 valve closed
1/13/2012	11:49:59 AM	PH3 valve closed
1/13/2012	11:49:59 AM	SiCl4 pre valve closed
1/13/2012	11:49:59 AM	SiCl4 post valve closed
1/13/2012	11:49:59 AM	Main Vac valve closed
1/13/2012	11:49:59 AM	Bypass valve closed
1/13/2012	11:49:59 AM	H2 valve opened
1/13/2012	11:49:59 AM	Bubbler valve opened
1/13/2012	11:49:59 AM	Helium MFC set to  0.000000
1/13/2012	11:49:59 AM	H2 MFC set to  500.000000
1/13/2012	11:49:59 AM	BCl3 MFC set to  0.000000
1/13/2012	11:49:59 AM	PH3 MFC set to  0.000000
1/13/2012	11:49:59 AM	SiCl4 MFC set to  0.000000
1/13/2012	11:49:59 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	11:49:59 AM	Tube furnace set to 750
1/13/2012	11:54:59 AM	H2 valve closed
1/13/2012	11:54:59 AM	BCl3 valve closed
1/13/2012	11:54:59 AM	PH3 valve closed
1/13/2012	11:54:59 AM	SiCl4 pre valve closed
1/13/2012	11:54:59 AM	SiCl4 post valve closed
1/13/2012	11:54:59 AM	Main Vac valve closed
1/13/2012	11:54:59 AM	Bypass valve closed
1/13/2012	11:54:59 AM	Helium valve opened
1/13/2012	11:54:59 AM	Bubbler valve opened
1/13/2012	11:54:59 AM	Helium MFC set to  500.000000
1/13/2012	11:54:59 AM	H2 MFC set to  0.000000
1/13/2012	11:54:59 AM	BCl3 MFC set to  0.000000
1/13/2012	11:54:59 AM	PH3 MFC set to  0.000000
1/13/2012	11:54:59 AM	SiCl4 MFC set to  0.000000
1/13/2012	11:54:59 AM	Bypass solenoid MFC set to  0.000000
1/13/2012	11:54:59 AM	Tube furnace set to 0
1/13/2012	12:14:59 PM	Helium valve closed
1/13/2012	12:14:59 PM	H2 valve closed
1/13/2012	12:14:59 PM	BCl3 valve closed
1/13/2012	12:14:59 PM	PH3 valve closed
1/13/2012	12:14:59 PM	SiCl4 pre valve closed
1/13/2012	12:14:59 PM	SiCl4 post valve closed
1/13/2012	12:14:59 PM	Main Vac valve closed
1/13/2012	12:14:59 PM	Bypass valve closed
1/13/2012	12:14:59 PM	Bubbler valve closed
1/13/2012	12:14:59 PM	Helium MFC set to  0.000000
1/13/2012	12:14:59 PM	H2 MFC set to  0.000000
1/13/2012	12:14:59 PM	BCl3 MFC set to  0.000000
1/13/2012	12:14:59 PM	PH3 MFC set to  0.000000
1/13/2012	12:14:59 PM	SiCl4 MFC set to  0.000000
1/13/2012	12:14:59 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	12:14:59 PM	Tube furnace set to 0
1/13/2012	12:15:00 PM	Run finished at 12:15 PM
1/13/2012	12:27:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2012	12:27:12 PM	Recipe started at 12:27 PM
1/13/2012	12:27:12 PM	Helium valve closed
1/13/2012	12:27:12 PM	H2 valve closed
1/13/2012	12:27:12 PM	BCl3 valve closed
1/13/2012	12:27:12 PM	PH3 valve closed
1/13/2012	12:27:12 PM	SiCl4 pre valve closed
1/13/2012	12:27:12 PM	SiCl4 post valve closed
1/13/2012	12:27:12 PM	Main Vac valve closed
1/13/2012	12:27:12 PM	Bubbler valve closed
1/13/2012	12:27:12 PM	Bypass valve opened
1/13/2012	12:27:12 PM	Helium MFC set to  0.000000
1/13/2012	12:27:12 PM	H2 MFC set to  0.000000
1/13/2012	12:27:12 PM	BCl3 MFC set to  0.000000
1/13/2012	12:27:12 PM	PH3 MFC set to  0.000000
1/13/2012	12:27:12 PM	SiCl4 MFC set to  0.000000
1/13/2012	12:27:12 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	12:27:12 PM	Tube furnace set to 0
1/13/2012	12:28:13 PM	Helium valve closed
1/13/2012	12:28:13 PM	H2 valve closed
1/13/2012	12:28:13 PM	BCl3 valve closed
1/13/2012	12:28:13 PM	PH3 valve closed
1/13/2012	12:28:13 PM	SiCl4 pre valve closed
1/13/2012	12:28:13 PM	SiCl4 post valve closed
1/13/2012	12:28:13 PM	Main Vac valve closed
1/13/2012	12:28:13 PM	Bubbler valve closed
1/13/2012	12:28:13 PM	Bypass valve opened
1/13/2012	12:28:13 PM	Helium MFC set to  0.000000
1/13/2012	12:28:13 PM	H2 MFC set to  0.000000
1/13/2012	12:28:13 PM	BCl3 MFC set to  0.000000
1/13/2012	12:28:13 PM	PH3 MFC set to  0.000000
1/13/2012	12:28:13 PM	SiCl4 MFC set to  0.000000
1/13/2012	12:28:13 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	12:28:13 PM	Tube furnace set to 0
1/13/2012	12:29:13 PM	Helium valve closed
1/13/2012	12:29:13 PM	H2 valve closed
1/13/2012	12:29:13 PM	BCl3 valve closed
1/13/2012	12:29:13 PM	PH3 valve closed
1/13/2012	12:29:13 PM	SiCl4 pre valve closed
1/13/2012	12:29:13 PM	SiCl4 post valve closed
1/13/2012	12:29:13 PM	Bypass valve closed
1/13/2012	12:29:13 PM	Bubbler valve closed
1/13/2012	12:29:13 PM	Main Vac valve opened
1/13/2012	12:29:13 PM	Helium MFC set to  0.000000
1/13/2012	12:29:13 PM	H2 MFC set to  0.000000
1/13/2012	12:29:13 PM	BCl3 MFC set to  0.000000
1/13/2012	12:29:13 PM	PH3 MFC set to  0.000000
1/13/2012	12:29:14 PM	SiCl4 MFC set to  0.000000
1/13/2012	12:29:14 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	12:29:14 PM	Tube furnace set to 0
1/13/2012	12:29:15 PM	Run finished at 12:29 PM
1/13/2012	12:29:15 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2012	1:22:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/13/2012	1:22:35 PM	Recipe started at 1:22 PM
1/13/2012	1:22:35 PM	Helium valve closed
1/13/2012	1:22:35 PM	H2 valve closed
1/13/2012	1:22:35 PM	BCl3 valve closed
1/13/2012	1:22:35 PM	PH3 valve closed
1/13/2012	1:22:35 PM	SiCl4 pre valve closed
1/13/2012	1:22:35 PM	SiCl4 post valve closed
1/13/2012	1:22:35 PM	Main Vac valve closed
1/13/2012	1:22:35 PM	Bubbler valve closed
1/13/2012	1:22:35 PM	Bypass valve opened
1/13/2012	1:22:35 PM	Helium MFC set to  0.000000
1/13/2012	1:22:35 PM	H2 MFC set to  0.000000
1/13/2012	1:22:35 PM	BCl3 MFC set to  0.000000
1/13/2012	1:22:35 PM	PH3 MFC set to  0.000000
1/13/2012	1:22:35 PM	SiCl4 MFC set to  0.000000
1/13/2012	1:22:35 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	1:22:35 PM	Tube furnace set to 0
1/13/2012	1:22:35 PM	Helium valve closed
1/13/2012	1:22:35 PM	H2 valve closed
1/13/2012	1:22:35 PM	BCl3 valve closed
1/13/2012	1:22:35 PM	PH3 valve closed
1/13/2012	1:22:35 PM	SiCl4 pre valve closed
1/13/2012	1:22:35 PM	SiCl4 post valve closed
1/13/2012	1:22:35 PM	Main Vac valve closed
1/13/2012	1:22:35 PM	Bubbler valve closed
1/13/2012	1:22:35 PM	Bypass valve opened
1/13/2012	1:22:35 PM	Helium MFC set to  0.000000
1/13/2012	1:22:35 PM	H2 MFC set to  0.000000
1/13/2012	1:22:35 PM	BCl3 MFC set to  0.000000
1/13/2012	1:22:35 PM	PH3 MFC set to  0.000000
1/13/2012	1:22:35 PM	SiCl4 MFC set to  0.000000
1/13/2012	1:22:35 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	1:22:35 PM	Tube furnace set to 0
1/13/2012	1:22:40 PM	Helium valve closed
1/13/2012	1:22:40 PM	H2 valve closed
1/13/2012	1:22:40 PM	BCl3 valve closed
1/13/2012	1:22:40 PM	PH3 valve closed
1/13/2012	1:22:40 PM	SiCl4 pre valve closed
1/13/2012	1:22:40 PM	SiCl4 post valve closed
1/13/2012	1:22:40 PM	Bypass valve closed
1/13/2012	1:22:40 PM	Bubbler valve closed
1/13/2012	1:22:40 PM	Main Vac valve opened
1/13/2012	1:22:40 PM	Helium MFC set to  0.000000
1/13/2012	1:22:40 PM	H2 MFC set to  0.000000
1/13/2012	1:22:40 PM	BCl3 MFC set to  0.000000
1/13/2012	1:22:40 PM	PH3 MFC set to  0.000000
1/13/2012	1:22:40 PM	SiCl4 MFC set to  0.000000
1/13/2012	1:22:40 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	1:22:40 PM	Tube furnace set to 0
1/13/2012	1:22:41 PM	H2 valve closed
1/13/2012	1:22:41 PM	BCl3 valve closed
1/13/2012	1:22:41 PM	PH3 valve closed
1/13/2012	1:22:41 PM	SiCl4 pre valve closed
1/13/2012	1:22:41 PM	SiCl4 post valve closed
1/13/2012	1:22:41 PM	Bypass valve closed
1/13/2012	1:22:41 PM	Bubbler valve closed
1/13/2012	1:22:41 PM	Helium valve opened
1/13/2012	1:22:41 PM	Main Vac valve opened
1/13/2012	1:22:41 PM	Helium MFC set to  20.000000
1/13/2012	1:22:41 PM	H2 MFC set to  0.000000
1/13/2012	1:22:41 PM	BCl3 MFC set to  0.000000
1/13/2012	1:22:41 PM	PH3 MFC set to  0.000000
1/13/2012	1:22:41 PM	SiCl4 MFC set to  0.000000
1/13/2012	1:22:41 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	1:22:41 PM	Tube furnace set to 0
1/13/2012	1:23:11 PM	Helium valve closed
1/13/2012	1:23:11 PM	H2 valve closed
1/13/2012	1:23:11 PM	BCl3 valve closed
1/13/2012	1:23:11 PM	PH3 valve closed
1/13/2012	1:23:11 PM	SiCl4 pre valve closed
1/13/2012	1:23:11 PM	SiCl4 post valve closed
1/13/2012	1:23:11 PM	Bypass valve closed
1/13/2012	1:23:11 PM	Bubbler valve closed
1/13/2012	1:23:11 PM	Main Vac valve opened
1/13/2012	1:23:11 PM	Helium MFC set to  0.000000
1/13/2012	1:23:11 PM	H2 MFC set to  0.000000
1/13/2012	1:23:11 PM	BCl3 MFC set to  0.000000
1/13/2012	1:23:11 PM	PH3 MFC set to  0.000000
1/13/2012	1:23:11 PM	SiCl4 MFC set to  0.000000
1/13/2012	1:23:11 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	1:23:12 PM	Tube furnace set to 0
1/13/2012	1:23:42 PM	H2 valve closed
1/13/2012	1:23:42 PM	BCl3 valve closed
1/13/2012	1:23:42 PM	PH3 valve closed
1/13/2012	1:23:42 PM	SiCl4 pre valve closed
1/13/2012	1:23:42 PM	SiCl4 post valve closed
1/13/2012	1:23:42 PM	Bypass valve closed
1/13/2012	1:23:42 PM	Bubbler valve closed
1/13/2012	1:23:42 PM	Helium valve opened
1/13/2012	1:23:42 PM	Main Vac valve opened
1/13/2012	1:23:42 PM	Helium MFC set to  20.000000
1/13/2012	1:23:42 PM	H2 MFC set to  0.000000
1/13/2012	1:23:42 PM	BCl3 MFC set to  0.000000
1/13/2012	1:23:42 PM	PH3 MFC set to  0.000000
1/13/2012	1:23:42 PM	SiCl4 MFC set to  0.000000
1/13/2012	1:23:42 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	1:23:42 PM	Tube furnace set to 0
1/13/2012	1:24:12 PM	Helium valve closed
1/13/2012	1:24:12 PM	H2 valve closed
1/13/2012	1:24:12 PM	BCl3 valve closed
1/13/2012	1:24:12 PM	PH3 valve closed
1/13/2012	1:24:12 PM	SiCl4 pre valve closed
1/13/2012	1:24:12 PM	SiCl4 post valve closed
1/13/2012	1:24:12 PM	Bypass valve closed
1/13/2012	1:24:12 PM	Bubbler valve closed
1/13/2012	1:24:12 PM	Main Vac valve opened
1/13/2012	1:24:12 PM	Helium MFC set to  0.000000
1/13/2012	1:24:12 PM	H2 MFC set to  0.000000
1/13/2012	1:24:12 PM	BCl3 MFC set to  0.000000
1/13/2012	1:24:12 PM	PH3 MFC set to  0.000000
1/13/2012	1:24:12 PM	SiCl4 MFC set to  0.000000
1/13/2012	1:24:12 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	1:24:12 PM	Tube furnace set to 0
1/13/2012	1:24:42 PM	H2 valve closed
1/13/2012	1:24:42 PM	BCl3 valve closed
1/13/2012	1:24:42 PM	PH3 valve closed
1/13/2012	1:24:42 PM	SiCl4 pre valve closed
1/13/2012	1:24:42 PM	SiCl4 post valve closed
1/13/2012	1:24:42 PM	Bypass valve closed
1/13/2012	1:24:42 PM	Bubbler valve closed
1/13/2012	1:24:42 PM	Helium valve opened
1/13/2012	1:24:42 PM	Main Vac valve opened
1/13/2012	1:24:42 PM	Helium MFC set to  20.000000
1/13/2012	1:24:42 PM	H2 MFC set to  0.000000
1/13/2012	1:24:42 PM	BCl3 MFC set to  0.000000
1/13/2012	1:24:42 PM	PH3 MFC set to  0.000000
1/13/2012	1:24:42 PM	SiCl4 MFC set to  0.000000
1/13/2012	1:24:42 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	1:24:42 PM	Tube furnace set to 0
1/13/2012	1:25:12 PM	Helium valve closed
1/13/2012	1:25:12 PM	H2 valve closed
1/13/2012	1:25:12 PM	BCl3 valve closed
1/13/2012	1:25:12 PM	PH3 valve closed
1/13/2012	1:25:12 PM	SiCl4 pre valve closed
1/13/2012	1:25:12 PM	SiCl4 post valve closed
1/13/2012	1:25:12 PM	Bypass valve closed
1/13/2012	1:25:12 PM	Bubbler valve closed
1/13/2012	1:25:12 PM	Main Vac valve opened
1/13/2012	1:25:12 PM	Helium MFC set to  0.000000
1/13/2012	1:25:12 PM	H2 MFC set to  0.000000
1/13/2012	1:25:12 PM	BCl3 MFC set to  0.000000
1/13/2012	1:25:12 PM	PH3 MFC set to  0.000000
1/13/2012	1:25:12 PM	SiCl4 MFC set to  0.000000
1/13/2012	1:25:12 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	1:25:12 PM	Tube furnace set to 0
1/13/2012	1:25:42 PM	H2 valve closed
1/13/2012	1:25:42 PM	BCl3 valve closed
1/13/2012	1:25:42 PM	PH3 valve closed
1/13/2012	1:25:42 PM	SiCl4 pre valve closed
1/13/2012	1:25:42 PM	SiCl4 post valve closed
1/13/2012	1:25:42 PM	Bypass valve closed
1/13/2012	1:25:42 PM	Bubbler valve closed
1/13/2012	1:25:42 PM	Helium valve opened
1/13/2012	1:25:42 PM	Main Vac valve opened
1/13/2012	1:25:42 PM	Helium MFC set to  20.000000
1/13/2012	1:25:42 PM	H2 MFC set to  0.000000
1/13/2012	1:25:42 PM	BCl3 MFC set to  0.000000
1/13/2012	1:25:42 PM	PH3 MFC set to  0.000000
1/13/2012	1:25:42 PM	SiCl4 MFC set to  0.000000
1/13/2012	1:25:42 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	1:25:43 PM	Tube furnace set to 0
1/13/2012	1:26:13 PM	Helium valve closed
1/13/2012	1:26:13 PM	H2 valve closed
1/13/2012	1:26:13 PM	BCl3 valve closed
1/13/2012	1:26:13 PM	PH3 valve closed
1/13/2012	1:26:13 PM	SiCl4 pre valve closed
1/13/2012	1:26:13 PM	SiCl4 post valve closed
1/13/2012	1:26:13 PM	Bypass valve closed
1/13/2012	1:26:13 PM	Bubbler valve closed
1/13/2012	1:26:13 PM	Main Vac valve opened
1/13/2012	1:26:13 PM	Helium MFC set to  0.000000
1/13/2012	1:26:13 PM	H2 MFC set to  0.000000
1/13/2012	1:26:13 PM	BCl3 MFC set to  0.000000
1/13/2012	1:26:13 PM	PH3 MFC set to  0.000000
1/13/2012	1:26:13 PM	SiCl4 MFC set to  0.000000
1/13/2012	1:26:13 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	1:26:13 PM	Tube furnace set to 0
1/13/2012	1:26:43 PM	H2 valve closed
1/13/2012	1:26:43 PM	BCl3 valve closed
1/13/2012	1:26:43 PM	PH3 valve closed
1/13/2012	1:26:43 PM	SiCl4 pre valve closed
1/13/2012	1:26:43 PM	SiCl4 post valve closed
1/13/2012	1:26:43 PM	Bypass valve closed
1/13/2012	1:26:43 PM	Bubbler valve closed
1/13/2012	1:26:43 PM	Helium valve opened
1/13/2012	1:26:43 PM	Main Vac valve opened
1/13/2012	1:26:43 PM	Helium MFC set to  20.000000
1/13/2012	1:26:43 PM	H2 MFC set to  0.000000
1/13/2012	1:26:43 PM	BCl3 MFC set to  0.000000
1/13/2012	1:26:43 PM	PH3 MFC set to  0.000000
1/13/2012	1:26:43 PM	SiCl4 MFC set to  0.000000
1/13/2012	1:26:43 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	1:26:43 PM	Tube furnace set to 0
1/13/2012	1:27:13 PM	Helium valve closed
1/13/2012	1:27:13 PM	H2 valve closed
1/13/2012	1:27:13 PM	BCl3 valve closed
1/13/2012	1:27:13 PM	PH3 valve closed
1/13/2012	1:27:13 PM	SiCl4 pre valve closed
1/13/2012	1:27:13 PM	SiCl4 post valve closed
1/13/2012	1:27:13 PM	Bypass valve closed
1/13/2012	1:27:13 PM	Bubbler valve closed
1/13/2012	1:27:13 PM	Main Vac valve opened
1/13/2012	1:27:13 PM	Helium MFC set to  0.000000
1/13/2012	1:27:13 PM	H2 MFC set to  0.000000
1/13/2012	1:27:13 PM	BCl3 MFC set to  0.000000
1/13/2012	1:27:13 PM	PH3 MFC set to  0.000000
1/13/2012	1:27:13 PM	SiCl4 MFC set to  0.000000
1/13/2012	1:27:13 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	1:27:13 PM	Tube furnace set to 0
1/13/2012	1:27:43 PM	H2 valve closed
1/13/2012	1:27:43 PM	BCl3 valve closed
1/13/2012	1:27:43 PM	PH3 valve closed
1/13/2012	1:27:43 PM	SiCl4 pre valve closed
1/13/2012	1:27:43 PM	SiCl4 post valve closed
1/13/2012	1:27:43 PM	Bypass valve closed
1/13/2012	1:27:43 PM	Bubbler valve closed
1/13/2012	1:27:43 PM	Helium valve opened
1/13/2012	1:27:43 PM	Main Vac valve opened
1/13/2012	1:27:43 PM	Helium MFC set to  20.000000
1/13/2012	1:27:43 PM	H2 MFC set to  0.000000
1/13/2012	1:27:43 PM	BCl3 MFC set to  0.000000
1/13/2012	1:27:43 PM	PH3 MFC set to  0.000000
1/13/2012	1:27:43 PM	SiCl4 MFC set to  0.000000
1/13/2012	1:27:43 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	1:27:43 PM	Tube furnace set to 0
1/13/2012	1:28:13 PM	Helium valve closed
1/13/2012	1:28:13 PM	H2 valve closed
1/13/2012	1:28:13 PM	BCl3 valve closed
1/13/2012	1:28:13 PM	PH3 valve closed
1/13/2012	1:28:13 PM	SiCl4 pre valve closed
1/13/2012	1:28:13 PM	SiCl4 post valve closed
1/13/2012	1:28:13 PM	Bypass valve closed
1/13/2012	1:28:13 PM	Bubbler valve closed
1/13/2012	1:28:13 PM	Main Vac valve opened
1/13/2012	1:28:13 PM	Helium MFC set to  0.000000
1/13/2012	1:28:13 PM	H2 MFC set to  0.000000
1/13/2012	1:28:13 PM	BCl3 MFC set to  0.000000
1/13/2012	1:28:13 PM	PH3 MFC set to  0.000000
1/13/2012	1:28:13 PM	SiCl4 MFC set to  0.000000
1/13/2012	1:28:13 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	1:28:14 PM	Tube furnace set to 0
1/13/2012	1:28:44 PM	H2 valve closed
1/13/2012	1:28:44 PM	BCl3 valve closed
1/13/2012	1:28:44 PM	PH3 valve closed
1/13/2012	1:28:44 PM	SiCl4 pre valve closed
1/13/2012	1:28:44 PM	SiCl4 post valve closed
1/13/2012	1:28:44 PM	Bypass valve closed
1/13/2012	1:28:44 PM	Bubbler valve closed
1/13/2012	1:28:44 PM	Helium valve opened
1/13/2012	1:28:44 PM	Main Vac valve opened
1/13/2012	1:28:44 PM	Helium MFC set to  20.000000
1/13/2012	1:28:44 PM	H2 MFC set to  0.000000
1/13/2012	1:28:44 PM	BCl3 MFC set to  0.000000
1/13/2012	1:28:44 PM	PH3 MFC set to  0.000000
1/13/2012	1:28:44 PM	SiCl4 MFC set to  0.000000
1/13/2012	1:28:44 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	1:28:44 PM	Tube furnace set to 0
1/13/2012	1:29:14 PM	Helium valve closed
1/13/2012	1:29:14 PM	H2 valve closed
1/13/2012	1:29:14 PM	BCl3 valve closed
1/13/2012	1:29:14 PM	PH3 valve closed
1/13/2012	1:29:14 PM	SiCl4 pre valve closed
1/13/2012	1:29:14 PM	SiCl4 post valve closed
1/13/2012	1:29:14 PM	Bypass valve closed
1/13/2012	1:29:14 PM	Bubbler valve closed
1/13/2012	1:29:14 PM	Main Vac valve opened
1/13/2012	1:29:14 PM	Helium MFC set to  0.000000
1/13/2012	1:29:14 PM	H2 MFC set to  0.000000
1/13/2012	1:29:14 PM	BCl3 MFC set to  0.000000
1/13/2012	1:29:14 PM	PH3 MFC set to  0.000000
1/13/2012	1:29:14 PM	SiCl4 MFC set to  0.000000
1/13/2012	1:29:14 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	1:29:14 PM	Tube furnace set to 0
1/13/2012	1:29:44 PM	H2 valve closed
1/13/2012	1:29:44 PM	BCl3 valve closed
1/13/2012	1:29:44 PM	PH3 valve closed
1/13/2012	1:29:44 PM	SiCl4 pre valve closed
1/13/2012	1:29:44 PM	SiCl4 post valve closed
1/13/2012	1:29:44 PM	Bypass valve closed
1/13/2012	1:29:44 PM	Bubbler valve closed
1/13/2012	1:29:44 PM	Helium valve opened
1/13/2012	1:29:44 PM	Main Vac valve opened
1/13/2012	1:29:44 PM	Helium MFC set to  20.000000
1/13/2012	1:29:44 PM	H2 MFC set to  0.000000
1/13/2012	1:29:44 PM	BCl3 MFC set to  0.000000
1/13/2012	1:29:44 PM	PH3 MFC set to  0.000000
1/13/2012	1:29:44 PM	SiCl4 MFC set to  0.000000
1/13/2012	1:29:44 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	1:29:44 PM	Tube furnace set to 0
1/13/2012	1:30:14 PM	Helium valve closed
1/13/2012	1:30:14 PM	H2 valve closed
1/13/2012	1:30:14 PM	BCl3 valve closed
1/13/2012	1:30:14 PM	PH3 valve closed
1/13/2012	1:30:14 PM	SiCl4 pre valve closed
1/13/2012	1:30:14 PM	SiCl4 post valve closed
1/13/2012	1:30:14 PM	Bypass valve closed
1/13/2012	1:30:14 PM	Bubbler valve closed
1/13/2012	1:30:14 PM	Main Vac valve opened
1/13/2012	1:30:14 PM	Helium MFC set to  0.000000
1/13/2012	1:30:14 PM	H2 MFC set to  0.000000
1/13/2012	1:30:14 PM	BCl3 MFC set to  0.000000
1/13/2012	1:30:14 PM	PH3 MFC set to  0.000000
1/13/2012	1:30:14 PM	SiCl4 MFC set to  0.000000
1/13/2012	1:30:14 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	1:30:14 PM	Tube furnace set to 0
1/13/2012	1:30:44 PM	H2 valve closed
1/13/2012	1:30:44 PM	BCl3 valve closed
1/13/2012	1:30:44 PM	PH3 valve closed
1/13/2012	1:30:44 PM	SiCl4 pre valve closed
1/13/2012	1:30:44 PM	SiCl4 post valve closed
1/13/2012	1:30:44 PM	Bypass valve closed
1/13/2012	1:30:44 PM	Bubbler valve closed
1/13/2012	1:30:44 PM	Helium valve opened
1/13/2012	1:30:44 PM	Main Vac valve opened
1/13/2012	1:30:44 PM	Helium MFC set to  20.000000
1/13/2012	1:30:44 PM	H2 MFC set to  0.000000
1/13/2012	1:30:44 PM	BCl3 MFC set to  0.000000
1/13/2012	1:30:44 PM	PH3 MFC set to  0.000000
1/13/2012	1:30:44 PM	SiCl4 MFC set to  0.000000
1/13/2012	1:30:44 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	1:30:45 PM	Tube furnace set to 0
1/13/2012	1:31:15 PM	Helium valve closed
1/13/2012	1:31:15 PM	H2 valve closed
1/13/2012	1:31:15 PM	BCl3 valve closed
1/13/2012	1:31:15 PM	PH3 valve closed
1/13/2012	1:31:15 PM	SiCl4 pre valve closed
1/13/2012	1:31:15 PM	SiCl4 post valve closed
1/13/2012	1:31:15 PM	Bypass valve closed
1/13/2012	1:31:15 PM	Bubbler valve closed
1/13/2012	1:31:15 PM	Main Vac valve opened
1/13/2012	1:31:15 PM	Helium MFC set to  0.000000
1/13/2012	1:31:15 PM	H2 MFC set to  0.000000
1/13/2012	1:31:15 PM	BCl3 MFC set to  0.000000
1/13/2012	1:31:15 PM	PH3 MFC set to  0.000000
1/13/2012	1:31:15 PM	SiCl4 MFC set to  0.000000
1/13/2012	1:31:15 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	1:31:15 PM	Tube furnace set to 0
1/13/2012	1:31:45 PM	H2 valve closed
1/13/2012	1:31:45 PM	BCl3 valve closed
1/13/2012	1:31:45 PM	PH3 valve closed
1/13/2012	1:31:45 PM	SiCl4 pre valve closed
1/13/2012	1:31:45 PM	SiCl4 post valve closed
1/13/2012	1:31:45 PM	Bypass valve closed
1/13/2012	1:31:45 PM	Bubbler valve closed
1/13/2012	1:31:45 PM	Helium valve opened
1/13/2012	1:31:45 PM	Main Vac valve opened
1/13/2012	1:31:45 PM	Helium MFC set to  20.000000
1/13/2012	1:31:45 PM	H2 MFC set to  0.000000
1/13/2012	1:31:45 PM	BCl3 MFC set to  0.000000
1/13/2012	1:31:45 PM	PH3 MFC set to  0.000000
1/13/2012	1:31:45 PM	SiCl4 MFC set to  0.000000
1/13/2012	1:31:45 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	1:31:45 PM	Tube furnace set to 0
1/13/2012	1:32:15 PM	Helium valve closed
1/13/2012	1:32:15 PM	H2 valve closed
1/13/2012	1:32:15 PM	BCl3 valve closed
1/13/2012	1:32:15 PM	PH3 valve closed
1/13/2012	1:32:15 PM	SiCl4 pre valve closed
1/13/2012	1:32:15 PM	SiCl4 post valve closed
1/13/2012	1:32:15 PM	Bypass valve closed
1/13/2012	1:32:15 PM	Bubbler valve closed
1/13/2012	1:32:15 PM	Main Vac valve opened
1/13/2012	1:32:15 PM	Helium MFC set to  0.000000
1/13/2012	1:32:15 PM	H2 MFC set to  0.000000
1/13/2012	1:32:15 PM	BCl3 MFC set to  0.000000
1/13/2012	1:32:15 PM	PH3 MFC set to  0.000000
1/13/2012	1:32:15 PM	SiCl4 MFC set to  0.000000
1/13/2012	1:32:15 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	1:32:15 PM	Tube furnace set to 0
1/13/2012	1:32:16 PM	Run finished at 1:32 PM
1/13/2012	1:32:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/13/2012	1:32:57 PM	Main Vac valve closed
1/13/2012	1:33:31 PM	Main Vac valve opened
1/13/2012	1:33:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/13/2012	1:33:48 PM	Recipe started at 1:33 PM
1/13/2012	1:33:48 PM	Helium valve closed
1/13/2012	1:33:48 PM	H2 valve closed
1/13/2012	1:33:48 PM	BCl3 valve closed
1/13/2012	1:33:48 PM	PH3 valve closed
1/13/2012	1:33:48 PM	SiCl4 pre valve closed
1/13/2012	1:33:48 PM	SiCl4 post valve closed
1/13/2012	1:33:48 PM	Main Vac valve closed
1/13/2012	1:33:48 PM	Bubbler valve closed
1/13/2012	1:33:48 PM	Bypass valve opened
1/13/2012	1:33:48 PM	Helium MFC set to  0.000000
1/13/2012	1:33:48 PM	H2 MFC set to  0.000000
1/13/2012	1:33:48 PM	BCl3 MFC set to  0.000000
1/13/2012	1:33:48 PM	PH3 MFC set to  0.000000
1/13/2012	1:33:48 PM	SiCl4 MFC set to  0.000000
1/13/2012	1:33:48 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	1:33:48 PM	Tube furnace set to 0
1/13/2012	1:33:48 PM	Helium valve closed
1/13/2012	1:33:48 PM	H2 valve closed
1/13/2012	1:33:48 PM	BCl3 valve closed
1/13/2012	1:33:48 PM	PH3 valve closed
1/13/2012	1:33:48 PM	SiCl4 pre valve closed
1/13/2012	1:33:48 PM	SiCl4 post valve closed
1/13/2012	1:33:48 PM	Main Vac valve closed
1/13/2012	1:33:48 PM	Bubbler valve closed
1/13/2012	1:33:48 PM	Bypass valve opened
1/13/2012	1:33:48 PM	Helium MFC set to  0.000000
1/13/2012	1:33:48 PM	H2 MFC set to  0.000000
1/13/2012	1:33:48 PM	BCl3 MFC set to  0.000000
1/13/2012	1:33:48 PM	PH3 MFC set to  0.000000
1/13/2012	1:33:48 PM	SiCl4 MFC set to  0.000000
1/13/2012	1:33:48 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	1:33:48 PM	Tube furnace set to 0
1/13/2012	1:33:55 PM	Helium valve closed
1/13/2012	1:33:55 PM	H2 valve closed
1/13/2012	1:33:55 PM	BCl3 valve closed
1/13/2012	1:33:55 PM	PH3 valve closed
1/13/2012	1:33:55 PM	SiCl4 pre valve closed
1/13/2012	1:33:55 PM	SiCl4 post valve closed
1/13/2012	1:33:55 PM	Bypass valve closed
1/13/2012	1:33:55 PM	Bubbler valve closed
1/13/2012	1:33:55 PM	Main Vac valve opened
1/13/2012	1:33:55 PM	Helium MFC set to  0.000000
1/13/2012	1:33:55 PM	H2 MFC set to  0.000000
1/13/2012	1:33:55 PM	BCl3 MFC set to  0.000000
1/13/2012	1:33:55 PM	PH3 MFC set to  0.000000
1/13/2012	1:33:55 PM	SiCl4 MFC set to  0.000000
1/13/2012	1:33:55 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	1:33:55 PM	Tube furnace set to 0
1/13/2012	1:33:56 PM	H2 valve closed
1/13/2012	1:33:56 PM	BCl3 valve closed
1/13/2012	1:33:56 PM	PH3 valve closed
1/13/2012	1:33:56 PM	SiCl4 pre valve closed
1/13/2012	1:33:56 PM	SiCl4 post valve closed
1/13/2012	1:33:56 PM	Bypass valve closed
1/13/2012	1:33:56 PM	Bubbler valve closed
1/13/2012	1:33:56 PM	Helium valve opened
1/13/2012	1:33:56 PM	Main Vac valve opened
1/13/2012	1:33:56 PM	Helium MFC set to  20.000000
1/13/2012	1:33:56 PM	H2 MFC set to  0.000000
1/13/2012	1:33:56 PM	BCl3 MFC set to  0.000000
1/13/2012	1:33:56 PM	PH3 MFC set to  0.000000
1/13/2012	1:33:56 PM	SiCl4 MFC set to  0.000000
1/13/2012	1:33:56 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	1:33:56 PM	Tube furnace set to 0
1/13/2012	1:34:26 PM	Helium valve closed
1/13/2012	1:34:26 PM	H2 valve closed
1/13/2012	1:34:26 PM	BCl3 valve closed
1/13/2012	1:34:26 PM	PH3 valve closed
1/13/2012	1:34:26 PM	SiCl4 pre valve closed
1/13/2012	1:34:26 PM	SiCl4 post valve closed
1/13/2012	1:34:26 PM	Bypass valve closed
1/13/2012	1:34:26 PM	Bubbler valve closed
1/13/2012	1:34:26 PM	Main Vac valve opened
1/13/2012	1:34:26 PM	Helium MFC set to  0.000000
1/13/2012	1:34:26 PM	H2 MFC set to  0.000000
1/13/2012	1:34:26 PM	BCl3 MFC set to  0.000000
1/13/2012	1:34:26 PM	PH3 MFC set to  0.000000
1/13/2012	1:34:26 PM	SiCl4 MFC set to  0.000000
1/13/2012	1:34:26 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	1:34:26 PM	Tube furnace set to 0
1/13/2012	1:34:38 PM	Run aborted at 1:34 PM
1/13/2012	1:34:38 PM	Helium valve closed
1/13/2012	1:34:38 PM	H2 valve closed
1/13/2012	1:34:38 PM	BCl3 valve closed
1/13/2012	1:34:38 PM	PH3 valve closed
1/13/2012	1:34:38 PM	SiCl4 pre valve closed
1/13/2012	1:34:38 PM	SiCl4 post valve closed
1/13/2012	1:34:38 PM	Bypass valve closed
1/13/2012	1:34:38 PM	Main Vac valve closed
1/13/2012	1:34:38 PM	Bubbler valve closed
1/13/2012	1:34:38 PM	Helium MFC set to  0.000000
1/13/2012	1:34:38 PM	H2 MFC set to  0.000000
1/13/2012	1:34:38 PM	BCl3 MFC set to  0.000000
1/13/2012	1:34:38 PM	PH3 MFC set to  0.000000
1/13/2012	1:34:38 PM	SiCl4 MFC set to  0.000000
1/13/2012	1:34:38 PM	Tube furnace set to 0
1/13/2012	1:34:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
1/13/2012	1:34:41 PM	Main Vac valve opened
1/13/2012	1:35:16 PM	Main Vac valve closed
1/13/2012	1:35:35 PM	Main Vac valve opened
1/13/2012	1:37:46 PM	Recipe started at 1:37 PM
1/13/2012	1:37:46 PM	Helium valve closed
1/13/2012	1:37:46 PM	H2 valve closed
1/13/2012	1:37:46 PM	BCl3 valve closed
1/13/2012	1:37:46 PM	PH3 valve closed
1/13/2012	1:37:46 PM	SiCl4 pre valve closed
1/13/2012	1:37:46 PM	SiCl4 post valve closed
1/13/2012	1:37:46 PM	Main Vac valve closed
1/13/2012	1:37:46 PM	Bypass valve closed
1/13/2012	1:37:46 PM	Bubbler valve closed
1/13/2012	1:37:46 PM	Helium MFC set to  0.000000
1/13/2012	1:37:46 PM	H2 MFC set to  0.000000
1/13/2012	1:37:46 PM	BCl3 MFC set to  0.000000
1/13/2012	1:37:46 PM	PH3 MFC set to  0.000000
1/13/2012	1:37:46 PM	SiCl4 MFC set to  0.000000
1/13/2012	1:37:46 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	1:37:46 PM	Tube furnace set to 0
1/13/2012	1:37:49 PM	Helium valve closed
1/13/2012	1:37:49 PM	BCl3 valve closed
1/13/2012	1:37:49 PM	PH3 valve closed
1/13/2012	1:37:49 PM	SiCl4 pre valve closed
1/13/2012	1:37:49 PM	SiCl4 post valve closed
1/13/2012	1:37:49 PM	Main Vac valve closed
1/13/2012	1:37:49 PM	Bypass valve closed
1/13/2012	1:37:49 PM	Bubbler valve closed
1/13/2012	1:37:49 PM	H2 valve opened
1/13/2012	1:37:49 PM	Helium MFC set to  0.000000
1/13/2012	1:37:49 PM	H2 MFC set to  500.000000
1/13/2012	1:37:49 PM	BCl3 MFC set to  0.000000
1/13/2012	1:37:49 PM	PH3 MFC set to  0.000000
1/13/2012	1:37:49 PM	SiCl4 MFC set to  0.000000
1/13/2012	1:37:49 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	1:37:49 PM	Tube furnace set to 0
1/13/2012	1:39:00 PM	Helium valve closed
1/13/2012	1:39:00 PM	BCl3 valve closed
1/13/2012	1:39:00 PM	PH3 valve closed
1/13/2012	1:39:00 PM	SiCl4 pre valve closed
1/13/2012	1:39:00 PM	SiCl4 post valve closed
1/13/2012	1:39:00 PM	Main Vac valve closed
1/13/2012	1:39:00 PM	Bypass valve closed
1/13/2012	1:39:00 PM	H2 valve opened
1/13/2012	1:39:00 PM	Bubbler valve opened
1/13/2012	1:39:00 PM	Helium MFC set to  0.000000
1/13/2012	1:39:00 PM	H2 MFC set to  500.000000
1/13/2012	1:39:00 PM	BCl3 MFC set to  0.000000
1/13/2012	1:39:00 PM	PH3 MFC set to  0.000000
1/13/2012	1:39:00 PM	SiCl4 MFC set to  0.000000
1/13/2012	1:39:00 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	1:39:00 PM	Tube furnace set to 0
1/13/2012	1:39:01 PM	Helium valve closed
1/13/2012	1:39:01 PM	BCl3 valve closed
1/13/2012	1:39:01 PM	PH3 valve closed
1/13/2012	1:39:01 PM	SiCl4 pre valve closed
1/13/2012	1:39:01 PM	SiCl4 post valve closed
1/13/2012	1:39:01 PM	Main Vac valve closed
1/13/2012	1:39:01 PM	Bypass valve closed
1/13/2012	1:39:01 PM	H2 valve opened
1/13/2012	1:39:01 PM	Bubbler valve opened
1/13/2012	1:39:01 PM	Helium MFC set to  0.000000
1/13/2012	1:39:01 PM	H2 MFC set to  500.000000
1/13/2012	1:39:01 PM	BCl3 MFC set to  0.000000
1/13/2012	1:39:01 PM	PH3 MFC set to  0.000000
1/13/2012	1:39:01 PM	SiCl4 MFC set to  0.000000
1/13/2012	1:39:01 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	1:39:01 PM	Tube furnace set to 1000
1/13/2012	1:59:01 PM	Helium valve closed
1/13/2012	1:59:01 PM	PH3 valve closed
1/13/2012	1:59:01 PM	Main Vac valve closed
1/13/2012	1:59:01 PM	Bypass valve closed
1/13/2012	1:59:01 PM	H2 valve opened
1/13/2012	1:59:01 PM	BCl3 valve opened
1/13/2012	1:59:01 PM	SiCl4 pre valve opened
1/13/2012	1:59:01 PM	SiCl4 post valve opened
1/13/2012	1:59:01 PM	Bubbler valve opened
1/13/2012	1:59:01 PM	Helium MFC set to  0.000000
1/13/2012	1:59:01 PM	H2 MFC set to  500.000000
1/13/2012	1:59:01 PM	BCl3 MFC set to  1.000000
1/13/2012	1:59:01 PM	PH3 MFC set to  0.000000
1/13/2012	1:59:01 PM	SiCl4 MFC set to  50.000000
1/13/2012	1:59:01 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	1:59:01 PM	Tube furnace set to 1000
1/13/2012	2:24:02 PM	Helium valve closed
1/13/2012	2:24:02 PM	BCl3 valve closed
1/13/2012	2:24:02 PM	PH3 valve closed
1/13/2012	2:24:02 PM	SiCl4 pre valve closed
1/13/2012	2:24:02 PM	SiCl4 post valve closed
1/13/2012	2:24:02 PM	Main Vac valve closed
1/13/2012	2:24:02 PM	Bypass valve closed
1/13/2012	2:24:02 PM	H2 valve opened
1/13/2012	2:24:02 PM	Bubbler valve opened
1/13/2012	2:24:02 PM	Helium MFC set to  0.000000
1/13/2012	2:24:02 PM	H2 MFC set to  500.000000
1/13/2012	2:24:02 PM	BCl3 MFC set to  0.000000
1/13/2012	2:24:02 PM	PH3 MFC set to  0.000000
1/13/2012	2:24:02 PM	SiCl4 MFC set to  0.000000
1/13/2012	2:24:02 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	2:24:02 PM	Tube furnace set to 750
1/13/2012	2:29:02 PM	H2 valve closed
1/13/2012	2:29:02 PM	BCl3 valve closed
1/13/2012	2:29:02 PM	PH3 valve closed
1/13/2012	2:29:02 PM	SiCl4 pre valve closed
1/13/2012	2:29:02 PM	SiCl4 post valve closed
1/13/2012	2:29:02 PM	Main Vac valve closed
1/13/2012	2:29:02 PM	Bypass valve closed
1/13/2012	2:29:02 PM	Helium valve opened
1/13/2012	2:29:02 PM	Bubbler valve opened
1/13/2012	2:29:02 PM	Helium MFC set to  500.000000
1/13/2012	2:29:02 PM	H2 MFC set to  0.000000
1/13/2012	2:29:02 PM	BCl3 MFC set to  0.000000
1/13/2012	2:29:02 PM	PH3 MFC set to  0.000000
1/13/2012	2:29:02 PM	SiCl4 MFC set to  0.000000
1/13/2012	2:29:02 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	2:29:02 PM	Tube furnace set to 0
1/13/2012	2:49:02 PM	Helium valve closed
1/13/2012	2:49:02 PM	H2 valve closed
1/13/2012	2:49:02 PM	BCl3 valve closed
1/13/2012	2:49:02 PM	PH3 valve closed
1/13/2012	2:49:02 PM	SiCl4 pre valve closed
1/13/2012	2:49:02 PM	SiCl4 post valve closed
1/13/2012	2:49:02 PM	Main Vac valve closed
1/13/2012	2:49:02 PM	Bypass valve closed
1/13/2012	2:49:02 PM	Bubbler valve closed
1/13/2012	2:49:02 PM	Helium MFC set to  0.000000
1/13/2012	2:49:02 PM	H2 MFC set to  0.000000
1/13/2012	2:49:02 PM	BCl3 MFC set to  0.000000
1/13/2012	2:49:02 PM	PH3 MFC set to  0.000000
1/13/2012	2:49:02 PM	SiCl4 MFC set to  0.000000
1/13/2012	2:49:02 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	2:49:02 PM	Tube furnace set to 0
1/13/2012	2:49:03 PM	Run finished at 2:49 PM
1/13/2012	2:52:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/13/2012	2:52:44 PM	Recipe started at 2:52 PM
1/13/2012	2:52:44 PM	Helium valve closed
1/13/2012	2:52:44 PM	H2 valve closed
1/13/2012	2:52:44 PM	BCl3 valve closed
1/13/2012	2:52:44 PM	PH3 valve closed
1/13/2012	2:52:44 PM	SiCl4 pre valve closed
1/13/2012	2:52:44 PM	SiCl4 post valve closed
1/13/2012	2:52:44 PM	Main Vac valve closed
1/13/2012	2:52:44 PM	Bubbler valve closed
1/13/2012	2:52:44 PM	Bypass valve opened
1/13/2012	2:52:44 PM	Helium MFC set to  0.000000
1/13/2012	2:52:44 PM	H2 MFC set to  0.000000
1/13/2012	2:52:44 PM	BCl3 MFC set to  0.000000
1/13/2012	2:52:44 PM	PH3 MFC set to  0.000000
1/13/2012	2:52:44 PM	SiCl4 MFC set to  0.000000
1/13/2012	2:52:44 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	2:52:44 PM	Tube furnace set to 0
1/13/2012	2:53:39 PM	Helium valve closed
1/13/2012	2:53:39 PM	H2 valve closed
1/13/2012	2:53:39 PM	BCl3 valve closed
1/13/2012	2:53:39 PM	PH3 valve closed
1/13/2012	2:53:39 PM	SiCl4 pre valve closed
1/13/2012	2:53:39 PM	SiCl4 post valve closed
1/13/2012	2:53:39 PM	Main Vac valve closed
1/13/2012	2:53:39 PM	Bubbler valve closed
1/13/2012	2:53:39 PM	Bypass valve opened
1/13/2012	2:53:39 PM	Helium MFC set to  0.000000
1/13/2012	2:53:39 PM	H2 MFC set to  0.000000
1/13/2012	2:53:39 PM	BCl3 MFC set to  0.000000
1/13/2012	2:53:39 PM	PH3 MFC set to  0.000000
1/13/2012	2:53:39 PM	SiCl4 MFC set to  0.000000
1/13/2012	2:53:39 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	2:53:39 PM	Tube furnace set to 0
1/13/2012	2:54:39 PM	Helium valve closed
1/13/2012	2:54:39 PM	H2 valve closed
1/13/2012	2:54:39 PM	BCl3 valve closed
1/13/2012	2:54:39 PM	PH3 valve closed
1/13/2012	2:54:39 PM	SiCl4 pre valve closed
1/13/2012	2:54:39 PM	SiCl4 post valve closed
1/13/2012	2:54:39 PM	Bypass valve closed
1/13/2012	2:54:39 PM	Bubbler valve closed
1/13/2012	2:54:39 PM	Main Vac valve opened
1/13/2012	2:54:39 PM	Helium MFC set to  0.000000
1/13/2012	2:54:39 PM	H2 MFC set to  0.000000
1/13/2012	2:54:39 PM	BCl3 MFC set to  0.000000
1/13/2012	2:54:39 PM	PH3 MFC set to  0.000000
1/13/2012	2:54:39 PM	SiCl4 MFC set to  0.000000
1/13/2012	2:54:39 PM	Bypass solenoid MFC set to  0.000000
1/13/2012	2:54:40 PM	Tube furnace set to 0
1/13/2012	2:54:41 PM	Run finished at 2:54 PM
1/13/2012	2:54:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
